US Patent Issued to KLA on Jan. 13 for "System and method for optical wafer characterization with image up-sampling" (Dutch, American Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,524,867, issued on Jan. 13, was assigned to KLA Corp. (Milpitas, Calif.).

"System and method for optical wafer characterization with image up-sampling" was invented by Abdurrahman Sezginer (Monte Sereno, Calif.), Wei Zhao (Breda, Netherlands), Richard Wallingford (San Jose, Calif.), Grace Hsiu-Ling Chen (Los Gatos, Calif.), Xuzhao Liu (Milpitas, Calif.), Ge Cong (Pleasanton, Calif.), Leon Yu (Milpitas, Calif.), Kuljit Virk (Fremont, Calif.), Bosheng Zhang (Milpitas, Calif.), Amrish Patel (Milpitas, Calif.) and Patrick McBride (Davis, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system includes a processing unit communicatively coupled to a de...