US Patent Issued to KLA on Jan. 13 for "System and method for estimating measurement uncertainty for characterization systems" (California, Michigan Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,523,968, issued on Jan. 13, was assigned to KLA Corp. (Milpitas, Calif.).

"System and method for estimating measurement uncertainty for characterization systems" was invented by Stilian Pandev (Santa Clara, Calif.) and Min-Yeong Moon (Ann Arbor, Mich.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A characterization system is disclosed. The system may include one or more controllers including one or more processors configured to execute a set of program instructions stored in memory. The controller may be configured to train a machine learning-based characterization library based on a set of training data. The controller may be configured to generate on...