US Patent Issued to KLA on Dec. 30 for "Metrology in the presence of CMOS under array (CuA) structures utilizing an effective medium model with physical modeling" (California Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,590, issued on Dec. 30, was assigned to KLA Corp. (Milpitas, Calif.).

"Metrology in the presence of CMOS under array (CuA) structures utilizing an effective medium model with physical modeling" was invented by Houssam Chouaib (San Jose, Calif.), Zhaxylyk Kudyshev (Milpitas, Calif.), Chao Chang (Milpitas, Calif.) and Derrick A. Shaughnessy (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system may include a controller including one or more processors configured to execute program instructions causing the one or more processors to implement a measurement recipe by: receiving optical measurement data for training samples including co...