ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,504,697, issued on Dec. 23, was assigned to KLA Corp. (Milpitas, Calif.).
"Single grab pupil landscape via broadband illumination" was invented by Yaniv Weiss (Tel-Aviv, Israel), Yuval Lubashevsky (Haifa, Israel), Itay Gdor (Tel-Aviv, Israel), Vladimir Levinski (Migdal HaEmek, Israel) and Alon Alexander Volfman (Tel-Aviv, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for overlay metrology may include generating broadband illumination beams and directing the broadband illumination beams to an overlay target on a sample, where the overlay target may include cells having periodic features formed as overlapping grating structures. The metho...