ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,175, issued on Dec. 2, was assigned to KLA Corp. (Milpitas, Calif.).
"Three-dimensional imaging with enhanced resolution" was invented by Xiumei Liu (Fremont, Calif.) and Mark S. Wang (San Ramon, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imaging system may include an imaging metrology tool with an illumination source, one or more illumination optics to direct illumination from the illumination source to a sample, a detector, one or more collection optics to image the sample onto the detector; and one or more aberration-controlling components. The one or more aberration-controlling components may provide aberration correction for imagin...