ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,379,642, issued on Aug. 5, was assigned to KLA Corp. (Milpitas, Calif.).
"Tunable DUV laser assembly" was invented by Yung-Ho Alex Chuang (Cupertino, Calif.), Yinying Xiao-Li (San Jose, Calif.), John Fielden (Los Altos, Calif.) and Baigang Zhang (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A tunable laser assembly uses a fundamental wavelength between 1 micro metre and 1.1 micro metre to alternately generate laser output light at two or more output wavelengths within the range of 184 nm to 200 nm by directing the fundamental light through different regions of a fan-out periodically poled nonlinear crystal to generate corresponding dif...