US Patent Issued to KLA on Aug. 5 for "Massive overlay metrology sampling with multiple measurement columns" (Israeli, American Inventors)

ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,379,669, issued on Aug. 5, was assigned to KLA Corp. (Milpitas, Calif.).

"Massive overlay metrology sampling with multiple measurement columns" was invented by Jonathan Madsen (Los Altos, Calif.), Andrei V. Shchegrov (Campbell, Calif.), Amnon Manassen (Haifa, Israel), Andrew V. Hill (Sunriver, Ore.), Yossi Simon (Qiryat Atta, Israel), Gilad Laredo (Haifa, Israel) and Yoram Uziel (Migdal Ha'emek, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-column metrology tool may include two or more measurement columns distributed along a column direction, where the two or more measurement columns simultaneously probe two or more measurement regions on...