US Patent Issued to KLA on Aug. 19 for "Inter-step feedforward process control in the manufacture of semiconductor devices" (Israeli Inventors)

ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,393,113, issued on Aug. 19, was assigned to KLA Corp. (Milpitas, Calif.).

"Inter-step feedforward process control in the manufacture of semiconductor devices" was invented by Roie Volkovich (Hadera, Israel), Liran Yerushalmi (Zicron Yaacob, Israel), Renan Milo (Rishon Lezion, Israel), Yoav Grauer (Haifa, Israel) and David Izraeli (Haifa, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for process control in the manufacture of semiconductor devices including performing metrology on at least one semiconductor wafer included in a given lot of semiconductor wafers, following processing of the at least one semiconductor wafer by a first proces...