US Patent Issued to KLA on April 22 for "Creating multiple electron beams with a photocathode film" (California Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,453, issued on April 22, was assigned to KLA Corp. (Milpitas, Calif.).

"Creating multiple electron beams with a photocathode film" was invented by Xinrong Jiang (Palo Alto, Calif.), Youfei Jiang (Milpitas, Calif.), Michael Steigerwald (Milpitas, Calif.) and Ralph Nyffenegger (Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electron-beam device includes a laser and a photocathode film. The photocathode film has a front side and a back side and emits a plurality of electron beamlets when illuminated from the back side using the laser. The electron-beam device also includes electrodes to extract the plurality of electron beamlets fro...