ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,407, issued on Sept. 23, was assigned to KIOXIA Corp. (Tokyo).
"Inspection device and inspection method" was invented by Chihiro Ida (Yokkaichi Mie, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection device includes an emission unit of first charging particles. A deflection unit deflects the first charging particles to scan a surface of a target object with the first charging particles. A detection unit detects second charging particles generated from the surface of the target object receiving the first charging particles. An image generation unit generates an image of the surface of the target object based on a detection result of ...