ALEXANDRIA, Va., July 9 -- United States Patent no. 12,351,913, issued on July 8, was assigned to Kioxia Corp. (Tokyo).
"Film forming apparatus and film forming method" was invented by Tomoki Ishimaru (Yokkaichi Mie, Japan), Masaya Toda (Yokkaichi Mie, Japan), Kota Takahashi (Yokkaichi Mie, Japan), Kenichiro Toratani (Yokkaichi Mie, Japan) and Kazuhiro Matsuo (Kuwana Mie, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A film forming apparatus of embodiments includes: a chamber including a sidewall; a shower head provided in an upper part of the chamber; a holder provided in the chamber holding a substrate; a first gas supply pipe supplying a first gas to the shower head; a first valve provided in the f...