ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,830, issued on Dec. 30, was assigned to KIOXIA Corp. (Tokyo).
"Measuring device and measuring method" was invented by Hiroyuki Tanizaki (Nagoya Aichi, Japan), Kiminori Yoshino (Kuwana Mie, Japan), Kaori Fumita (Yokkaichi Mie, Japan), Hiroaki Shirakawa (Yokkaichi Mie, Japan), Manabu Takakuwa (Tsu Mie, Japan), Kentaro Kasa (Nagoya Aichi, Japan), Soichi Inoue (Yokkaichi Mie, Japan) and Satoshi Tanaka (Yokohama Kanagawa, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A measuring device includes a light source that irradiates a measurement spot on a wafer formed with memory holes and slits with a multi-wavelength light, a first imaging unit that ac...