US Patent Issued to Kioxia on Aug. 12 for "Template, method for manufacturing template, and method for manufacturing semiconductor device" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,386,254, issued on Aug. 12, was assigned to Kioxia Corp. (Tokyo).

"Template, method for manufacturing template, and method for manufacturing semiconductor device" was invented by Kazuya Fukuhara (Yokkaichi Mie, Japan) and Kazuhiro Takahata (Yokohama Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to one embodiment, a template includes a base material with a first surface at a first level. A first pattern on the template includes first protruding portions in a first region that protrude to a second level beyond the first level, a first recess portion between an adjacent pair of first protruding portions in a central portion of th...