ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,537, issued on May 20, was assigned to KINGSEMI Co. LTD. (Shenyang, China).
"Coating and development equipment" was invented by Xudong Hong (Liaoning, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided in the present invention is a coating and development equipment, comprising a cassette module, a first process module, a second process module, and an interface module. A first inter-layer process manipulator, an intra-layer process manipulator group and a second inter-layer process manipulator are arranged between the first process module and the second process module, and the first inter-layer process manipulator, the second inter-layer p...