US Patent Issued to KCTECH on Oct. 21 for "Substrate processing system with vertical arrangement structure" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,370, issued on Oct. 21, was assigned to KCTECH Co. Ltd. (Anseong-si, South Korea).

"Substrate processing system with vertical arrangement structure" was invented by Dong Hwa Lee (Gyeonggi-do, South Korea), Hyung Chul Kim (Gyeonggi-do, South Korea) and You Sun Jung (Busan, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system, according to one embodiment, comprises: a cleaning device, positioned at a first position, for performing a cleaning process for a substrate; a drying device, positioned at a second position, for performing a drying process for the substrate; and a transfer unit for transferring the substrate ...