ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,508, issued on April 22, was assigned to Kawasaki Jukogyo K.K. (Kobe, Japan).
"In-vacuum twin-arm robot" was invented by Takeshi Shibata (Kobe, Japan) and Yoshiki Maeda (Kobe, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An in-vacuum twin-arm robot transports substrates in a vacuum space. The in-vacuum twin-arm robot includes a base arm, a first arm, a second arm, a first hand, and a second hand. The base arm can move vertically and can rotate. The first arm can rotate with respect to the base arm. The second arm can rotate with respect to the base arm. The first hand rotates with respect to the first arm and holds and transports the substrat...