ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,522,924, issued on Jan. 13, was assigned to JUSUNG ENGINEERING Co. LTD. (South Korea).
"Substrate processing device" was invented by Dae Soo Jang (Gwangju-si, South Korea), Hyeon Chang Kim (Gwangju-si, South Korea), Seung Youb Sa (Gwangju-si, South Korea), Kwang Su Yoo (Gwangju-si, South Korea), Ji Hun Lee (Gwangju-si, South Korea) and Chul Joo Hwang (Gwangju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present inventive concept relates to a substrate processing device, comprising: a chamber; a chamber lid that supports the upper portion of the chamber; a susceptor that is installed to face the chamber lid and supports a substrate;...