ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,479,050, issued on Nov. 25, was assigned to JSW Aktina System Co. Ltd. (Yokohama, Japan).
"Laser irradiation apparatus, information processing method, and recording medium recording program to be readable" was invented by Kenichi Ohmori (Yokohama, Japan), Yuzaburo Ohta (Yokohama, Japan) and Rei Matsushita (Yokohama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A laser irradiation apparatus is a laser irradiation apparatus including a laser light source, the laser irradiation apparatus including a failure prediction unit configured to perform failure prediction on a movable part used when a substrate is processed by the laser light source, in whi...