ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,728, issued on Sept. 9, was assigned to JEOL Ltd. (Tokyo).
"Electron beam inspection system" was invented by Ryuichi Kusakabe (Tokyo) and Noriyuki Kobayashi (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided an electron beam inspection system which can enhance the safety of the whole system if servo valves are deactivated in the event of a power failure or an emergency stop. The electron beam inspection system has a beam source, a stage mechanism, and a pump. The stage mechanism has a guide shaft, a slider, a first servo valve, a second servo valve, a first exhaust pipe, a second exhaust pipe, and an exhaust valve. The slider i...