ALEXANDRIA, Va., March 26 -- United States Patent no. 12,261,013, issued on March 25, was assigned to JEOL Ltd. (Tokyo).
"Charged particle beam system and control method therefor" was invented by Takeshi Kaneko (Tokyo), Isamu Ishikawa (Tokyo) and Eiji Okunishi (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a charged particle beam system capable of preventing the data acquisition time from increasing. A control method for the system is also provided. The charged particle beam system includes: a beam blanker for blanking a charged particle beam; a sample stage on which a sample is tiltably held and thus can assume a tilt angle; a blanking controller for controlling the blanking of the charge...