US Patent Issued to JEOL on Dec. 16 for "Charged particle beam apparatus and control method for charged particle beam apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,500,064, issued on Dec. 16, was assigned to JEOL Ltd. (Tokyo).

"Charged particle beam apparatus and control method for charged particle beam apparatus" was invented by Takeo Sasaki (Tokyo), Kanako Noguchi (Tokyo) and Kazuki Yagi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam apparatus for scanning a specimen with a charged particle beam and acquiring a scan image. The charged particle beam apparatus including: an optical system that includes a pulse mechanism for illuminating the specimen with pulses of the charged particle beam, and a deflector that deflects the charged particle beam and scans the specimen with the deflec...