ALEXANDRIA, Va., July 23 -- United States Patent no. 12,365,980, issued on July 22, was assigned to IVWORKS Co. LTD. (Daejeon, South Korea).
"Apparatus, method, and recording medium storing command for controlling thin-film deposition process" was invented by Young Kyun Noh (Daejeon, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure discloses an apparatus. The apparatus according to the present disclosure may include a communication interface, one or more memories, and one or more processors. The one or more processors may be configured to: control the thin-film deposition devices to execute the thin-film deposition process by accessing the memory and executing a recipe; obtai...