ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,429,495, issued on Sept. 30, was assigned to InvenSense Inc. (San Jose, Calif.).
"MEMS strain sensitivity calibration" was invented by Matthew Julian Thompson (Beaverton, Ore.) and Roberto Martini (Milan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS sensor may include multiple sense electrodes located relative to respective portions of one or more proof masses of a MEMS layer of the sensor. Individual sense electrodes are capable of individual calibration within the drive and/or sense path for the sense electrode. A distance between each individual sense electrode relative to a proof mass is determined for the at-rest state of the sensor. Calib...