US Patent Issued to INVENSENSE on June 3 for "Systems and methods for providing getters in microelectromechanical systems" (California Inventors)

ALEXANDRIA, Va., June 4 -- United States Patent no. 12,319,562, issued on June 3, was assigned to INVENSENSE INC. (San Jose, Calif.).

"Systems and methods for providing getters in microelectromechanical systems" was invented by Daesung Lee (San Jose, Calif.), Jeff Chunchieh Huang (Fremont, Calif.), Jongwoo Shin (Pleasanton, Calif.), Bongsang Kim (Mountain View, Calif.) and Logeeswaran Veerayah Jayaraman (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods are provided that provide a getter in a micromechanical system. In some embodiments, a microelectromechanical system (MEMS) is bonded to a substrate. The MEMS and the substrate have a first cavity and a second cavity therebet...