US Patent Issued to INTEVAC on April 22 for "Multifocal magnetron design for physical vapor deposition processing on a single cathode" (New York, California Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,470, issued on April 22, was assigned to INTEVAC INC. (Santa Clara, Calif.).

"Multifocal magnetron design for physical vapor deposition processing on a single cathode" was invented by Samuel D. Harkness IV (Albany, N.Y.) and Quang N. Tran (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus has a keeper plate with a keeper plate outer perimeter. An annular magnet array with an annular magnet array outer perimeter is coincident with the keeper plater outer perimeter. An inner top magnet is positioned on a centerline of a first side of the keeper plate and an inner bottom magnet is positioned on the centerline of a second side ...