US Patent Issued to INTERNATIONAL BUSINESS MACHINES on Oct. 14 for "Buried power rail at tight cell-to-cell space" (New York Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,653, issued on Oct. 14, was assigned to INTERNATIONAL BUSINESS MACHINES Corp. (Armonk, N.Y.).

"Buried power rail at tight cell-to-cell space" was invented by Ruilong Xie (Niskayuna, N.Y.), Stuart Sieg (Albany, N.Y.), Somnath Ghosh (Clifton Park, N.Y.), Kisik Choi (Watervliet, N.Y.) and Kevin Shawn Petrarca (Newburgh, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor device includes a first buried power rail (BPR) disposed through etch stop layers and a second BPR disposed in direct contact with the first BPR, where the first BPR has a larger critical dimension (CD) than the second BPR. A bottom surface of the first BPR directly con...