US Patent Issued to INTERNATIONAL BUSINESS MACHINES on June 17 for "PVD tool to deposit highly reactive materials" (New York Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,320, issued on June 17, was assigned to INTERNATIONAL BUSINESS MACHINES Corp. (Armonk, N.Y.).

"PVD tool to deposit highly reactive materials" was invented by Stephen L. Brown (Yorktown Heights, N.Y.), Bruce B. Doris (Slingerlands, N.Y.) and Mark C. Reuter (Montrose, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A deposition tool includes a vacuum chamber and a physical vapor deposition module including a target source in the vacuum chamber. The target source includes a target material for depositing on a workpiece. An evaporator module is independent of the physical vapor deposition module and is mounted within an enclosure in the vacuum chamb...