ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,420,225, issued on Sept. 23, was assigned to Intel Corp. (Santa Clara, Calif.).
"Manifold assembly for trap filter systems" was invented by Subramani Iyer (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure is directed to a manifold assembly for a trap filter system having an inlet for receiving a flow of gas effluents containing contaminants generated by a semiconductor processing tool, a housing for a plurality of filters, wherein the plurality of trap filters connected to the inlet and are interchangeable while the semiconductor processing tool remains in operation, and a bypass mechanism configured to selectively ...