ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,420, issued on Oct. 21, was assigned to Intel Corp. (Santa Clara, Calif.).
"Staircase-based metal-insulator-metal (MIM) capacitors" was invented by Prashant Majhi (San Jose, Calif.) and Anand Murthy (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Multi-plate MIM capacitors include a staircase structure, with steps including a high-k capacitor dielectric and one or more electrode plates. Contacts pass through insulator fill material and land on the electrode plate of a respective step. A recess passes through the staircase structure. In some examples, the recess is filled with insulator material, and steps of the staircase structure ha...