ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,284, issued on May 20, was assigned to Intel Corp. (Santa Clara, Calif.).
"Plug and trench architectures for integrated circuits and methods of manufacture" was invented by Charles H. Wallace (Portland, Ore.), Marvin Y. Paik (Portland, Ore.), Hyunsoo Park (Portland, Ore.), Mohit K. Haran (Hillsboro, Ore.), Alexander F. Kaplan (Portland, Ore.) and Ruth A. Brain (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and architectures for IC interconnect trenches, and trench plugs that define separations between two adjacent trench ends. Plugs and trenches may be defined through a multiple patterning process. An upper grating pattern ma...