US Patent Issued to Intel on July 1 for "Trench plug hardmask for advanced integrated circuit structure fabrication" (Oregon Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,349,450, issued on July 1, was assigned to Intel Corp. (Santa Clara, Calif.).

"Trench plug hardmask for advanced integrated circuit structure fabrication" was invented by Anthony St. Amour (Portland, Ore.), Michael L. Hattendorf (Portland, Ore.) and Christopher P. Auth (Portland, Ore.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon. A plurality of gate struct...