US Patent Issued to Intel on Jan. 28 for "Real-time detection of deflections and ruptures of EUV pellicle membranes" (California Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,209,975, issued on Jan. 28, was assigned to Intel Corp. (Santa Clara, Calif.).

"Real-time detection of deflections and ruptures of EUV pellicle membranes" was invented by John Ferdinand Magana (San Jose, Calif.) and Guojing Zhang (Saratoga, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure is directed to a reticle assembly having a reticle and a pellicle attached to a pellicle support frame positioned on the reticle and includes a sensor assembly having optical and sensor components, which monitor the pellicle. The optical components and the sensor components of the sensor assembly may be coupled to a controller, which may be ...