ALEXANDRIA, Va., Feb. 5 -- United States Patent no. 12,218,052, issued on Feb. 4, was assigned to Intel Corp. (Santa Clara, Calif.).
"Advanced lithography and self-assembled devices" was invented by Richard E. Schenker (Portland, Ore.), Robert L Bristol (Portland, Ore.), Kevin L. Lin (Beaverton, Ore.), Florian Gstrein (Portland, Ore.), James M. Blackwell (Portland, Ore.), Marie Krysak (Portland, Ore.), Manish Chandhok (Beaverton, Ore.), Paul A Nyhus (Portland, Ore.), Charles H. Wallace (Portland, Ore.), Curtis W. Ward (Hillsboro, Ore.), Swaminathan Sivakumar (Beaverton, Ore.) and Elliot N. Tan (Portland, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Advanced lithography techniques including sub-10 nm p...