ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,399,006, issued on Aug. 26, was assigned to Intel Corp. (Santa Clara, Calif.).
"Agitation monitoring system for plating process" was invented by Adrian Bayraktaroglu (Chandler, Ariz.), David Lampner (Chandler, Ariz.) and Darko Grujicic (Chandler, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure is directed to a monitoring system for a plating process using a monitoring device including a metrology component for collecting agitation intensity data on at least one agitation component within a plating equipment and transferring the collected agitation intensity data to a process control station."
The patent was filed on March 24...