ALEXANDRIA, Va., April 2 -- United States Patent no. 12,266,571, issued on April 1, was assigned to Intel Corp. (Santa Clara, Calif.).
"Self-aligned contacts" was invented by Mark T. Bohr (Aloha, Ore.), Tahir Ghani (Portland, Ore.), Nadia M. Rahhal-Orabi (Lake Oswego, Ore.), Subhash M. Joshi (Hillsboro, Ore.), Joseph M. Steigerwald (Forest Grove, Ore.), Jason W. Klaus (Portland, Ore.), Jack Hwang (Portland, Ore.) and Ryan Mackiewicz (Beaverton, Ore.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A transistor comprises a substrate, a pair of spacers on the substrate, a gate dielectric layer on the substrate and between the pair of spacers, a gate electrode layer on the gate dielectric layer and between the pa...