US Patent Issued to Infineon Technologies on Sept. 16 for "MEMS sensor with particle filter and method for producing it" (Austrian, German Inventors)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,415,719, issued on Sept. 16, was assigned to Infineon Technologies AG (Neubiberg, Germany).

"MEMS sensor with particle filter and method for producing it" was invented by Andre Brockmeier (Villach, Austria), Barbara Angela Glanzer (Klagenfurt, Austria), Marten Oldsen (Anzing, Germany), Francesco Solazzi (Villach, Austria) and Carsten Von Koblinski (Villach, Austria).

According to the abstract* released by the U.S. Patent & Trademark Office: "The semiconductor device includes a microelectromechanical system (MEMS) chip having a first main surface and a second main surface situated opposite the first main surface, a first glass-based substrate, on which the MEMS chip is arranged by it...