US Patent Issued to Infineon Technologies on May 20 for "Signal processing circuit for triple-membrane MEMS device" (German, Austrian Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,304,808, issued on May 20, was assigned to Infineon Technologies AG (Neubiberg, Germany).

"Signal processing circuit for triple-membrane MEMS device" was invented by Marc Fueldner (Neubiberg, Germany), Andreas Wiesbauer (Portschach, Austria) and Athanasios Kollias (Munich).

According to the abstract* released by the U.S. Patent & Trademark Office: "A triple-membrane MEMS device includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, a sealed low pressure chamber between the first membrane and the third membrane, a first stator and a second stator in the sealed lo...