US Patent Issued to Infineon Technologies on April 15 for "Method for determining a torsion angle of a mirror body of an MEMS apparatus" (Austrian Inventor)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,275,636, issued on April 15, was assigned to Infineon Technologies AG (Neubiberg, Germany).

"Method for determining a torsion angle of a mirror body of an MEMS apparatus" was invented by Franz Michael Darrer (Graz, Austria).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal."

The patent was filed on July 21, 2021, under Application No. 17/443,122.

*For further inform...