ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,227,846, issued on Feb. 18, was assigned to INFICON INC. (East Syracuse, N.Y.).
"Monitoring thin film deposition" was invented by Mohamed Buhary Rinzan (Manlius, N.Y.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system for monitoring thin film deposition is described. The system includes a quartz crystal and a synthesizer to generate a modulated signal. The modulated signal is to be grounded through the quartz crystal. The system also includes a phase detector to determine a phase of the modulated signal from the quartz crystal in order to monitor thin film deposition. A modulation index can be selected so that, at resonance, high frequency of the s...