US Patent Issued to Illinois Tool Works on March 25 for "Advanced pressure based mass flow controllers and diagnostics" (California Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,259,739, issued on March 25, was assigned to Illinois Tool Works Inc. (Glenview, Ill.).

"Advanced pressure based mass flow controllers and diagnostics" was invented by Arun Nagarajan (Freemont, Calif.), Daniel Mudd (Freemont, Calif.) and Mohamed Saleem (Freemont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A mass flow controller for controlling flow rate comprising a controller, a valve assembly, and at least one pressure sensor, valve position sensor, and temperature sensor; wherein, at least one of the sensors is a semiconductor based sensor. The valve assembly is in fluid communication with at least one upstream location and at least one d...