US Patent Issued to II-VI DELAWARE on Feb. 10 for "Planar buried optical waveguides in semiconductor substrate and methods of forming" (New Jersey Inventor)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,941, issued on Feb. 10, was assigned to II-VI DELAWARE INC. (Wilmington, Del.).

"Planar buried optical waveguides in semiconductor substrate and methods of forming" was invented by Young-Kai Chen (New Providence, N.J.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming a semiconductor device may include providing semiconductor substrate having a substrate top side and a dielectric layer along the substrate top side and forming a first mask layer over the dielectric layer. The method may include forming a lower cladding wall and an upper cladding wall via a first opening in the first mask layer. The method may also include forming a se...