US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on Sept. 9 for "Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof" (Dutch, German Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,727, issued on Sept. 9, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof" was invented by Pieter Kruit (Delft, Netherlands) and John Breuer (Munich).

According to the abstract* released by the U.S. Patent & Trademark Office: "A corrector for correcting aberrations of a charged particle beam in a charged particle beam device is described. The corrector includes a plurality of wires configured to be in a plane perpendicular to a beam axis. The wires forming two or more openings for passing of the charged ...