US Patent Issued to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH on Feb. 3 for "Charged particle optics, charged particle beam apparatus, and method for scanning a charged particle beam" (Dutch, German Inventors)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,542,253, issued on Feb. 3, was assigned to ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH (Heimstetten, Germany).

"Charged particle optics, charged particle beam apparatus, and method for scanning a charged particle beam" was invented by Benjamin Cook (Putzbrunn, Germany) and Pieter Kruit (Delft, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle optics for a charged particle beam apparatus having a charged particle beam and a beam propagation direction of the charged particle beam apparatus is described. The charged particle optics includes a focusing lens. The focusing lens includes a first electrod...