ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,523,863, issued on Jan. 13, was assigned to Huawei Technologies Co. Ltd. (Shenzhen, China).
"Electrostatic MEMS micromirror" was invented by Xiaoshi Dong (Shenzhen, China), Jinghui Xu (Shenzhen, China) and Fengpei Sun (Shenzhen, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic MEMS micromirror is provided, and may be used in a device such as a mobile phone, a microphone, a camera, a radar, or an optical switch. The electrostatic MEMS micromirror includes a support beam, a micromirror, and a drive component. The drive component includes a comb frame and a drive comb located in the comb frame. The support beam and the micromirror are ...