US Patent Issued to Hitachi High-Tech on Oct. 7 for "Objects detecting method for vacuum processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,016, issued on Oct. 7, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Objects detecting method for vacuum processing apparatus" was invented by Takaharu Kinoshita (Tokyo), Hisanori Hayano (Tokyo), Tomoyuki Watanabe (Tokyo) and Norifumi Ozaki (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An objects detecting method for a vacuum processing apparatus equipped with: a processing unit including a vacuum container having therein a processing chamber in which a wafer is processed, and an exhaust pump that exhausts gas in the processing chamber; a vacuum transfer unit including a transfer chamber in which the wafer is transferred; and a connection...