ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,437,962, issued on Oct. 7, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Charged particle beam apparatus" was invented by Naoko Takeda (Tokyo), Natsuki Tsuno (Tokyo), Satoshi Takada (Tokyo) and Yuto Hattori (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a technique and the like capable of specifying irradiation areas or irradiation positions of a beam and a light as clearly as possible. A charged particle beam apparatus 1 includes: a position adjustment mark 10 provided on a stage 6 and irradiated with a beam bl and a light a1; and a mechanism setting an irradiation position of the beam bl and an irradiation position of the light a...