ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,455,249, issued on Oct. 28, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Sample stage and optical inspection device" was invented by Masaya Yamamoto (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "In this sample stage that adsorbs and holds a sample, the configuration includes: an outer circumference stage that has a first adsorption surface and a pressure receiving chamber that is a recess formed in the center thereof; an inner circumference stage that has a second adsorption surface, and that is housed in the pressure receiving chamber and can project upward from the outer circumference stage; a first flow channel for a sample desorption op...