US Patent Issued to Hitachi High-Tech on Oct. 28 for "Energy filter, and energy analyzer and charged particle beam device provided with same" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,456,597, issued on Oct. 28, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Energy filter, and energy analyzer and charged particle beam device provided with same" was invented by Kazuhiro Honda (Tokyo), Hiroyuki Ito (Tokyo), Takashi Doi (Tokyo) and Soichiro Matsunaga (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A decelerating electrode of an energy filter includes an electrode pair that has an opening and a cavity portion provided in a rotationally symmetrical manner with the center of the opening as the optical axis. Voltages with electric potentials that are substantially the same as that of a charged particle beam are independently applie...