ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,461,126, issued on Nov. 4, was assigned to Hitachi High-Tech Corp. (Tokyo).
"Probe device" was invented by Naoki Samura (Tokyo) and Yasuhiko Nara (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A probe device includes a sample stage 125 that supports a sample, a probe unit 143 to which a probe 141 brought into contact with a predetermined sample surface of the sample is attached, a first camera 111A that images the sample and the probe, and a first camera optical axis adjustment stage 112A that adjusts an optical axis of the first camera, in which the optical axis of the first camera is parallel to the sample surface, and the first camera optical a...