US Patent Issued to Hitachi High-Tech on Nov. 4 for "Correction coefficient calculation device, correction coefficient calculation method, and correction coefficient calculation program" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,005, issued on Nov. 4, was assigned to Hitachi High-Tech Corp. (Tokyo).

"Correction coefficient calculation device, correction coefficient calculation method, and correction coefficient calculation program" was invented by Miki Aoyagi (Tokyo), Masumi Shirai (Tokyo) and Kei Sakai (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A defect inspection device calculates a machine difference correction coefficient for correcting a difference in the feature amount of a reference sample between devices. When a machine difference variation coefficient indicating the change over time in the feature amount of a calibration member is outside a threshold rang...